Top 10 Microelectronics and Microsystems Master’s Courses in Germany

TL;DR

• Germany offers specialised master’s courses in microelectronics and microsystems, as well as broader degrees with relevant specialisations.
• Most options below are taught in English. The Chemnitz course is taught in German, and Braunschweig’s English specialisation sits within a broader German-language degree.
• Compare the modules, language requirements and total cost before applying. Applicants usually need a related first degree.

What will you study?

Microelectronics focuses on electronic devices and circuits, including the chips used in computers, vehicles and medical equipment. Microsystems combine miniaturised components, such as sensors, electronics and tiny mechanical structures, into working systems.

Some courses focus on chip design or fabrication. Others connect electronics with control engineering, materials, photonics or software. That difference matters when you choose a course and prepare your application.

How we chose these courses

This is an editorial shortlist, not a numerical ranking or a claim that these are the ten best courses in Germany. We selected courses and specialisations for their relevance to microelectronics or microsystems, the practical or research work they offer, and the availability of university information. The list includes broader related options for students whose interests extend beyond chip design.

Ten courses to compare

1. Microelectronics and Microsystems at Hamburg University of Technology

This English-taught Master of Science combines microelectronics with miniaturised systems. It includes communication, computer science and signal processing options.

The four-semester course has two semesters of lectures and practical work, followed by research project work and a thesis. It suits applicants who want both electronics and microsystems rather than a narrow chip-design course.

2. Microsystems Engineering at the University of Freiburg

Freiburg’s English-taught, four-semester Master of Science covers microelectronics, micromechanics, fabrication and design. Students can focus on circuits and systems, biomedical engineering, materials and fabrication, or photonics. The course includes cleanroom experience.

Applicants need a relevant engineering background and C1 English. The university lists €1,500 per semester in tuition for non-EU nationals, plus semester charges; exemptions may apply.

3. Control, Microsystems, Microelectronics at the University of Bremen

This four-semester English-taught Master of Science combines hardware with control and automation. It covers microelectronics, microsystems and digital technology, with laboratory work and a final thesis. It is a useful option if you want to connect chip-level knowledge with the behaviour of larger systems. Check the current admission regulations for the required undergraduate background.

4. Microelectronic Systems at FH Westküste and HAW Hamburg

Offered jointly by the two Universities of Applied Sciences, this English-taught Master of Science focuses on developing and applying microelectronic systems. The three-semester course includes chip design, smart sensors and laboratory-based work. It also has links to the Fraunhofer Institute for Silicon Technology.

FH Westküste lists no tuition fees, although semester contributions apply. The application institution depends on the intake: FH Westküste for summer and HAW Hamburg for winter.

5. Microelectronics and Chip Design at the Technical University of Munich

This English-taught, four-semester Master of Science is aimed at students interested in designing chips. Students can specialise in digital or analogue and mixed-signal design and take part in a chip-design project.

TUM lists tuition of €6,000 per semester for international students from third countries, plus the semester fee. Waivers or scholarships may be available. Admission includes an aptitude assessment.

6. Micro- and Nanoelectronics at RWTH Aachen University

This is an English-taught major within the Master of Science in Electrical Engineering, Information Technology and Computer Engineering, rather than a separate degree. It covers semiconductor devices, sensors, circuit design and fabrication technologies. The faculty describes lectures, labs and an industrial internship of at least 18 weeks. It is worth exploring if you want both device physics and circuit design.

7. Microelectronics Engineering at TU Braunschweig

Microelectronics Engineering is an English-language specialisation within the four-semester Master of Science in Electrical Engineering and Information Technology. It covers chip processing and design, including silicon and gallium nitride technologies.

The wider degree is German-language, so check the precise language and module rules for the specialisation before applying. The university also lists a compulsory ten-week internship.

8. Microsystems and Microelectronics at Chemnitz University of Technology

Chemnitz offers a four-semester Master of Science with a choice of specialisation in micro- and nanoelectronics or microsystems and device engineering. Students can work on research and prototypes in cleanrooms or laboratory facilities.

The course is taught in German, although some modules are available in English. The university gives C1 German as a guide for direct admission and assesses the relevance of applicants’ previous degrees.

9. Nanoscience and Nanotechnology at the University of Siegen

This English-taught, four-semester Master of Science is a broader science-led option. It brings together physics, chemistry and electrical engineering, with study in nanoelectronic devices and practical micro- and nanotechnology. It may suit applicants interested in the materials and physics behind devices as well as electronics.

The university lists a relevant bachelor’s degree and English proficiency among its admission requirements.

10. Embedded Systems Engineering at the University of Freiburg

For students interested in how hardware and software work together, this English-taught Master of Science is a broader alternative to a dedicated microelectronics course. It runs for four semesters and offers options including circuits and systems, materials and fabrication, and cyber-physical systems.

Freiburg lists C1 English and a relevant technical bachelor’s background. Non-EU tuition is listed at €1,500 per semester, plus semester charges; exemptions may apply.

How to choose

Start with the work you want to do. Chip design calls for a different mix of modules from microfabrication, sensor development or embedded software. Read the module handbook and look for relevant laboratory projects and thesis options.

Then check the admission and cost details:

• Previous study: compare your transcript with the required mathematics, physics and engineering subjects. A similar degree title alone may not be enough.
• Language: check the whole degree, not just the name of a specialisation. English-taught study may still benefit from German for internships and daily life.
• Budget: distinguish tuition from the semester contribution and living costs. Rules can depend on your nationality or individual circumstances.
• Course structure: compare the duration, credit requirements, internships and research opportunities.

Explore courses

FAQ

Can I study microelectronics in Germany in English?

Yes. Several master’s courses and specialisations on this list are taught in English. Check the language of the full degree and its admission requirements, especially when the English option is a specialisation within a broader course.

What bachelor’s degree do I need?

Many courses seek a related degree in electrical engineering, electronics, mechatronics or a comparable field. Some interdisciplinary courses also accept relevant science backgrounds. Each university evaluates its own requirements.

Are these courses free for international students?

Not necessarily. Semester contributions generally apply, and some universities charge tuition to certain international students. Freiburg and TUM list tuition for some non-EU or third-country students. Check eligibility for exemptions and the latest fee schedule.

What is the difference between microelectronics and microsystems?

Microelectronics concentrates on small electronic devices and circuits. Microsystems engineering combines miniaturised components, which can include electronics, sensors and mechanical structures, into functional systems. Many courses cover both.